Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science.
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Table of Contents
Scanning probe-based lithography; E-beam lithography; E-beam lithography; Nanoimprint lithography; Attoliter inkjet printing; Patterned molecular binding on surfaces as a route to nanostructured surfaces; Convection assisted assembly of nanostructures; Directed assembly of nanostructures; Bio-inspired self-assembled filmsAuthor
Wiederrecht, Gary.Chemist, Group Leader, Nanophotonics Group Argonne National Laboratory Chemistry Division, E161 9700 South Cass Avenue Argonne, IL 60439-4831
