Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.
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Table of Contents
1. Noncontact Scanning Electrostatic Force Microscope2. Quartz Tuning Fork Atomic Force Microscope3. Micropipette Ball Probing System4. Low-Force Elastic Beam Surface Profiler5. Linear-Scan Micro Roundness Measuring Machine6. Micro-Gear Measuring Machine7. On-Machine Length Gauge Surface Profiler8. On-Machine Air-Bearing Surface Profiler9. On-Machine Atomic Force Microscope10. On-Machine Roll Profiler11. In-Process Fast Tool Servo Profiler12. Self-Calibration of Prove Tip Radius and Cutting Edge Sharpness
