Semiconductor Metrology and Inspection Market Report 2025

The semiconductor metrology and inspection market size has grown strongly in recent years. It will grow from $7.99 billion in 2024 to $8.46 billion in 2025 at a compound annual growth rate (CAGR) of 5.9%. The growth in the historic period can be attributed to miniaturization of semiconductor devices, demand for higher semiconductor yield, stringent quality standards, demand for higher process control, focus on defect reduction, globalization of semiconductor manufacturing, increased wafer sizes.

The semiconductor metrology and inspection market size is expected to see strong growth in the next few years. It will grow to $11.13 billion in 2029 at a compound annual growth rate (CAGR) of 7.1%. The growth in the forecast period can be attributed to increasing complexity of semiconductor designs, integration of metrology in process development, focus on smart manufacturing, development of EUV lithography, sustainability and environmental considerations, expansion of foundry and outsourced semiconductor manufacturing. Major trends in the forecast period include advancements in process technology, 3d integration and packaging, multi-modal metrology, in-line process control, advanced materials inspection, nanotechnology and miniaturization, advanced defect inspection, metrology for quantum computing.

The increasing application of smart devices is driving the growth of the semiconductor metrology and inspection market. A smart device is defined as any gadget with a wireless connection that can link to an app, the internet, a local network, or other devices. Enhanced user experiences, growing awareness of the benefits of smart device technology, and the expansion of reliable internet connections have contributed to the rise in smart devices. These devices rely on semiconductor metrology and inspection to ensure that every stage of the semiconductor production process is executed to the highest possible standards. For example, a report published in March 2023 by Cybercrew, a UK-based provider of cybersecurity solutions for businesses, indicated that the percentage of UK households using smartphones reached 91.43% in 2021, with projections showing an increase to 93.8% by 2026. Therefore, the growing application of smart devices is expected to significantly propel the semiconductor metrology and inspection market.

The semiconductor metrology and inspection market are set to experience significant growth due to the escalating demand for consumer electronics. The surge in demand for semiconductors in devices such as smartphones and IoT gadgets necessitates precise manufacturing processes. Stringent quality standards in the consumer electronics sector drive the adoption of advanced metrology tools for defect detection. The production data from May 2023, as per the Japan Electronics and Information Technology Industries Association, highlights a substantial increase in consumer electronics production compared to the previous year. This surge underscores the importance of semiconductor metrology and inspection in meeting the quality requirements of consumer electronics.

A prominent trend in the semiconductor metrology and inspection market is the focus on product innovation. Major companies in the industry are dedicated to introducing new technologies that enhance the inspection process and ensure the quality of semiconductor devices. For instance, Onto Innovation, a key player in semiconductor manufacturing, launched innovative acoustic metrology products in July 2022. The new Echo system, part of this innovation, significantly expands the addressable market for in-line characterization of opaque films. Operating at three times the signal-to-noise ratio of previous systems, the Echo system covers a wide range of film thicknesses and provides advanced materials characterization capabilities, including thermal conductivity measurement and in-line time domain thermo-reflectance for implant monitoring. This emphasis on innovation underscores the dynamic nature of the semiconductor metrology and inspection market.

Major players in the semiconductor metrology and inspection market are strategically investing in automation solutions to secure a competitive advantage. A notable example is the introduction of the Thermo Scientific Metrios 6 Scanning Transmission Electron Microscope ((S)TEM) by Thermo Fisher Scientific Inc. in June 2023. This fully automated metrology solution is specifically designed for semiconductor manufacturing, aiming to elevate productivity and ensure data quality assurance in high-volume production settings. The Metrios 6 (S)TEM incorporates advanced hardware and machine learning algorithms, providing up to a 20% improvement in average productivity compared to its predecessor. Featuring innovations like the Smart Stage for automated sample handling, the Ultra-X EDS detection system for rapid compositional characterization, and machine-learning-enabled automation, this system streamlines TEM metrology workflows, offering semiconductor manufacturers faster access to large-volume, high-quality data. The Metrios 6 (S)TEM is poised to accelerate learning cycles, support yield improvements, and reduce time-to-market for semiconductor advancements.

In a strategic move, Nordson Corporation, a prominent dispensing equipment manufacturer, bolstered its position in the semiconductor and electronics sectors through the acquisition of CyberOptics Corporation in August 2022. CyberOptics Corporation, a US-based developer and manufacturer of high-precision 3D sensing technology solutions, complemented Nordson's test and inspection platform. This acquisition not only broadened Nordson's product line but also strengthened its capabilities in delivering innovative solutions to meet the evolving needs of the semiconductor metrology and inspection market. The integration of CyberOptics' expertise aligns with Nordson's commitment to providing advanced and comprehensive solutions for the semiconductor industry.

Major companies operating in the semiconductor metrology and inspection market are KLA Corporation, Applied Materials Inc., Onto Innovation Inc. (Rudolph Technologies Corporation), Thermo Fisher Scientific Inc., Hitachi High-Tech Corporation, Nova Measuring Instruments Ltd., ASML Holding NV, Lasertec Corporation, JEOL Ltd., Nikon Metrology NV, Camtek Limited, Bruker Corporation, Nanometrics Incorporated, Horiba Ltd., Carl Zeiss AG, SENTECH Instruments GmbH, Keyence Corporation, Accurion GmbH, Alicona Imaging GmbH, Angstrom Engineering Inc., Nanofilm Technologies Inc, Veeco Instruments Inc., FormFactor Inc., Lam Research Corporation, INFICON Holding AG.

Asia-Pacific was the largest region in the semiconductor metrology and inspection market in 2024. Asia-Pacific is expected to be the fastest-growing region in the forecast period. The regions covered in the semiconductor metrology and inspection market report are Asia-Pacific, Western Europe, Eastern Europe, North America, South America, Middle East, Africa. The countries covered in the semiconductor metrology and inspection market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

The critical role of semiconductor metrology and inspection lies in ensuring the highest quality standards throughout the semiconductor production process. Inspection techniques detect surface particles, pattern errors, and other potential issues that could impact the performance of the final semiconductor device. Simultaneously, metrology methods verify that the desired physical and electrical parameters of the devices meet the required specifications at each stage of production.

Semiconductor metrology and inspection primarily consist of optical and e-beam methods. Optical inspection utilizes light and its reflections to take measurements. Within optical inspection, brightfield and darkfield are the two primary categories. Darkfield inspection measures light reflections at a reduced angle, whereas brightfield inspection focuses on light from a higher angle. Lithography metrology encompasses overlay, dimension equipment, mask inspection, and metrology. These techniques are extensively used in various aspects of semiconductor production, including lithography metrology, wafer inspection, and thin film metrology.

The semiconductor metrology and inspection market research report is one of a series of new reports that provides semiconductor metrology and inspection market statistics, including semiconductor metrology and inspection industry global market size, regional shares, competitors with a semiconductor metrology and inspection market share, detailed semiconductor metrology and inspection market segments, market trends and opportunities, and any further data you may need to thrive in the semiconductor metrology and inspection industry. This semiconductor metrology and inspection market research report delivers a complete perspective of everything you need, with an in-depth analysis of the current and future scenario of the industry.

The semiconductor metrology and inspection market includes revenues earned by lithography metrology and wafer inspection. The market value includes the value of related goods sold by the service provider or included within the service offering. Only goods and services traded between entities or sold to end consumers are included.

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD, unless otherwise specified).

The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

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