This technology has been used in industrial-scale applications for some time, including a wide range of metalized packaging. Its potential as a high-speed, scalable process has seen an increasing range of new products emerging that employ this cost-effective technology, including solar energy products that are moving from rigid panels onto cheaper and more versatile flexible substrates, flexible electronic circuit 'boards', and flexible displays.
In this third edition, all chapters are thoroughly revised with a significant amount of new information added, including newly developed barrier measurement techniques, improved in-vacuum monitoring technologies, and the latest developments in Atomic Layer Deposition (ALD).
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Table of Contents
1. What is a Vacuum? 2. Products using Vacuum Deposited Coatings onto Films or Foils 3. Pressure Measurement 4. Pumping 5. Process Diagnostics and Coating Characteristics 6. Leaks, Water Vapour and Leak Testing 7. Mass Spectrometers, Helium Leak Detectors and Residual Gas Analysers 8. Substrates, Surface Quality, Cleaning, Adhesion and Adhesion Testing 9. Adhesion and Adhesion Tests 10. Surface Treatment of Webs and Foils 11. Polymer Coatings 12. Nucleation, Coalescence and Film Growth 13. Pattern Metallization 14. The D.C. Glow Discharge or Plasma 15. Electron Beam (E-beam) Evaporation 16. Thermal Evaporation 17. Radiant Heated and Induction Heated Sources 18. Chemical Vapour Deposition onto Webs and Foils 19. ALD 20. Planar Magnetron Sputtering Source Design and Operation 21. Planar Magnetron Design Options 22. Reactive Deposition, Set-up and Control 23. Machine Specification and Build Issues and Risk Analysis Process 24. Heat Load onto Webs and Foils 25. Process Variables 26. Mechanical Design 27. Winding Webs in Vacuum 28. Machine Building Trends 29. System Design 30. Hazards 31. Troubleshooting 32. Final Thoughts
