Chemical Mechanical Planarization Market Report 2026

The chemical mechanical planarization market size has grown strongly in recent years. It will grow from $4.89 billion in 2025 to $5.24 billion in 2026 at a compound annual growth rate (CAGR) of 7.1%. The growth in the historic period can be attributed to expansion of planarization needs in early semiconductor nodes, growth in ic manufacturing, increasing use of polishing pads and slurries, adoption of cmp in mems production, rising need for wafer surface uniformity.

The chemical mechanical planarization market size is expected to see strong growth in the next few years. It will grow to $6.89 billion in 2030 at a compound annual growth rate (CAGR) of 7.1%. The growth in the forecast period can be attributed to growth in advanced process nodes, development of next-generation cmp consumables, expansion of compound semiconductor fabrication, rising demand for high-precision planarization, increasing integration of automation in cmp tools. Major trends in the forecast period include integration of intelligent cmp process control systems, advancement of digitalized cmp monitoring platforms, adoption of AI-driven planarization optimization, development of sustainable cmp consumables, expansion of IoT-enabled equipment diagnostics.

The surging popularity of smartphones is poised to drive the growth of the chemical mechanical planarization (CMP) market. Smartphones, featuring organic light-emitting diode (OLED) displays fabricated from flexible materials such as plastic, leverage chemical mechanical planarization for material removal, topography planarization, and device structure formation during manufacturing. a report from Uswitch Limited in February 2023 forecasts that 95% of the anticipated 68.3 million people in the UK by 2025 will own smartphones. This widespread adoption of smartphones is a key driver for the growth of the chemical mechanical planarization market.

Product innovation is a significant trend gaining momentum in the chemical mechanical planarization market. Leading companies in this sector are concentrating on technological advancements and the development of new products to enhance their market position. For example, in December 2023, Dow, a US-based materials science firm, introduced two new caustic soda products: Caustic DEC and TRACELIGHT DEC. These products are crafted to meet the growing industry demand for high-quality chemical solutions. Caustic soda finds extensive use in various applications, including water treatment, chemical production, and energy generation. Through this launch, Dow aims to fulfill market demands for efficient and sustainable solutions.

In January 2023, Amtech Systems Inc., a US-based manufacturer of semiconductor consumables and equipment, acquired Entrepix Inc., for an undisclosed amount. This acquisition is anticipated to broaden Amtech's market opportunities and expedite growth in the front-end wafer processing market, particularly in silicon carbide applications. Entrepix Inc., a US-based provider specializing in chemical mechanical planarization and wafer cleaning technologies, aligns well with Amtech's existing product portfolio. The integration of Entrepix's expertise is expected to enhance Amtech's capabilities, and the combined entities will benefit from a more extensive customer base, reinforcing their collective presence in the semiconductor industry.

Major companies operating in the chemical mechanical planarization market are Air Products, Applied Materials, Cabot, EBARA Technologies, Fujimi, Hitachi Chemical, Lapmaster Wolters, Okamoto, Dow, LAM Research, CMC Materials, Versum Materials, DuPont, BASF, Entegris, Revasum, Fujifilm, Tokyo Seimitsu, YAO SHENG, CMP Specialties.

Note that the outlook for this market is being affected by rapid changes in trade relations and tariffs globally. The report will be updated prior to delivery to reflect the latest status, including revised forecasts and quantified impact analysis. The report’s Recommendations and Conclusions sections will be updated to give strategies for entities dealing with the fast-moving international environment.

Tariffs have affected the chemical mechanical planarization market by increasing costs for imported slurries, polishing pads, electronic components, and specialty chemicals required for CMP tools and consumables. Semiconductor fabrication hubs in Asia-Pacific, North America, and Europe face higher operational expenses and extended procurement cycles due to tariff-related supply chain constraints. Nonetheless, tariffs are encouraging local chemical production, regional equipment manufacturing, and innovation in sustainable and cost-efficient CMP materials, ultimately strengthening long-term supply resilience.

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Chemical Mechanical Planarization (CMP) is a surface flattening method employed for silicon oxide, metal, and polysilicon surfaces. It involves utilizing both chemical and mechanical forces to polish surfaces, combining abrasive polishing and chemical etching processes.

The primary categories within Chemical Mechanical Planarization (CMP) are CMP consumables and CMP equipment. CMP consumables encompass various components such as slurry, pads, and pad conditioners. The technology associated with CMP can be classified into leading-edge technology and More than Moore's technology. These applications are used in various fields including integrated circuits, MEMS (Micro-Electro-Mechanical Systems), NEMS (Nano-Electro-Mechanical Systems), compound semiconductors, and optics.Asia-Pacific was the largest region in the chemical mechanical planarization market in 2025. The regions covered in the chemical mechanical planarization market report are Asia-Pacific, South East Asia, Western Europe, Eastern Europe, North America, South America, Middle East, Africa. The countries covered in the chemical mechanical planarization market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Taiwan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

The chemical mechanical planarization market consists of revenues earned by entities by providing services such as chemical mechanical polishing method and practice, post-CMP cleaning, particle removal by surfactants during semiconductor cleaning, process technology for copper interconnects, back-end-of-line cleaning, metal surface chemical composition, and morphology, brush scrubbing for post-CMP cleaning. The market value includes the value of related goods sold by the service provider or included within the service offering. The chemical mechanical planarization market also includes sales of polishing and grinding machines and slurry testing equipment. Values in this market are ‘factory gate’ values, that is the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified).

The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

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